Opertional Aspects
High Tension 200V – 30 kV; TMP pumped system
Tungsten emitter
2 inch/50 mm 4-axis motorized stage equipped with through-the-lens differential pumping
Detectors: SE; BSED and LFD
High vacuum (HV) and low vacuum (LV) modes
Magnification up to 1000000X
Special Provisions
Multi-stub holder can hold upto 7 specimens; Provision for observation of samples with minimum sample prep.
Accuracy Limit
Resolution: 3 nm at 30 kV with SE and 4 nm with BSE detector (HV mode)
Applications
Surface morphology analysis of all kinds of conductive and non-conductive samples.
SEM Request Form